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HfO2 Phase
Diagram
HfO2
XRD
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Dielectric Constant
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Phase HfO2
HfO2 Y2O3 Phase
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Bulk HfO2 Phase
Diagram Dopant
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Multifunctional
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Phase Diagram
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Gate Dielectric
Symmetry of L12
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Thin film (film thickness 10 nm) phase diagram for doped Hf…
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IPF Crystal orientation map of a TiN/HfO2/Pt thin film stack overlaid ...
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a) The crystal system of the HfO2 thin film …
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HfO 2 thin film thickness as a function of ALD cycles o…
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HRTEM images of the phase pure HfO2-x layers with increasing oxygen ...
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Spectral characteristics of HfO 2 thin films: (a) refractive index ...
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